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RSP150 (Handle & Metal Plate)

RSP150(Handle&Metal Plate-for ASML Scanner)

The RSP150 is an advanced reticle handling carrier providing a single piece of 6-inch reticle with well protection during storage and automatic transport. Via the metal plate on the top cover, the pod not only can be transferred by a robot system but also reduces opportunity for reticle damage of unexpected dropping. With patented lining of the shell, it keeps the reticle safe from the electrostatic discharge damage

§  Reticle Size6 x  6 x 0.25(inch)

§  Shell MaterialPMMA

§  150mm Standard Mechanical Interface (SMIF)

§  ASML Scanner Compatible

RSP150(Handle&Metal Plate-for Nikno Scanner)

The RSP150 is an advanced reticle handling carrier providing a single piece of 6-inch reticle with well protection during storage and automatic transport. Via the metal plate on the top cover, the pod not only can be transferred by a robot system but also reduces opportunity for reticle damage of unexpected dropping. With patented lining of the shell, it keeps the reticle safe from the electrostatic discharge damage.

 

§  Reticle Size6 x  6 x 0.25(inch)

§  Shell MaterialPMMA

§  150mm Standard Mechanical Interface (SMIF)

§  Nikon Scanner Compatible

RSP150(Handle&Metal)

The RSP150 is an advanced reticle handling carrier providing a single piece of 6-inch reticle with well protection during storage and automatic transport. Via the metal plate on the top cover, the pod not only can be transferred by a robot system but also reduces opportunity for reticle damage of unexpected dropping. 

§  Reticle Size6 x  6 x 0.25(inch)

§  Shell MaterialAntistatic ABS,PC

§  Both ASML/Nikon Scanner Compatible

§  Fully compatible with previous generation pods

RSP150(Handle)

The RSP150 is an advanced reticle handling carrier providing a single piece of 6-inch reticle with well protection during storage and transport.

§  Reticle Size6 x  6 x 0.25(inch)

§  Shell MaterialABS, EMI

§  ASML Scanner Compatible

§  Fully compatible with previous generation pods

 
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