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RSP150 (OHT Flange)


RSP150(OHT Flange)


The RSP150 is an advanced reticle handling carrier providing a single piece of 6-inch reticle with well protection during storage and automatic transport. With the OHT flange, it can be transferred via anOHT system. The internal temperature and related humidity also can be controlled with Nitrogen or clean dry air purging. The pod keeps the reticle in a well sealed environment to prevent it from external contamination.

§  Reticle Size6 x  6 x 0.25(inch)

§  Shell MaterialAntistatic ABS,PC

§  150mm Standard Mechanical Interface (SMIF)

§  ASML/Nikon/Canon Scanner Compatible

§  With Gas Purge Valves Installed

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