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200mm Wafer Handling

200mm Wafer Carrier

200mm Wafer Cassette-High temperature resistance

The 25-piece 8-inch wafer carrier is suitable for transfer between process stations. It can store wafers and ensure safe transportation when matched with the wafer cassette box. All dimensions are in compliance with SEMI specifications, and can be customized according to the machine settings to ensure the compatibility of the wafer cassette with the machine.The material has the characteristics of low outgassing, wear resistance and high temperature resistance, which can effectively improve the process yield and efficiency.
  • Size
    200mm (8 in.)
  • Material
    PEEK
  • Piece
    25Piece or 13Piece
Feature
  • ESD static dissipative material: preventing the wafer from being damaged by static electricity. 
  • Wear-resistant material: effectively reduce particle generation
  • High temperature resistant material, improve process efficiency: heat deflection temperature up to 240 ℃
  • Upright positioning design: avoid loading errors
  • Overlap hole site design: easy to exchange wafers
  • All sizes comply with SEMI specifications
  • The wafer pitch can be adjusted according to customized requirements
  • Selectable items:
  • a.Appearance(Handle, mechanical gripping and positioning points, etc.)
  • b.Support H bar machine interface
  • c.Support RFID function
  • d..Laser engraving: customized design