The 6-inch reticle carrier is suitable for Canon exposure machines. The outer box is made of low outgassing material, and the support is made of wear-resistant, static dissipative and low outgassing material, which reduces the particle cause by friction between the reticle and the support, minimizing the risk of electrostatic damage and Haze contamination.
Size
6 x 6 x 0.25 (in.)
Material
ABS(ESD)
Application
Suitable for Canon exposure machines
Feature
ESD static dissipative material: Preventing the reticle from being damaged by static electricity
The contact points with the reticle are all wear-resistant materials: effectively reduce particle generation