RSP 150

RSP150 (Handle & Splint on both sides) PEEK material

Provides high-efficiency protection for 6-inch reticles during transportation and storage between process stations, supports OHT automatic transportation, and has an purge function to control the temperature and humidity of the micro-environment inside the reticle box. The interior is covered with a special material to block the electric field and protect the reticle from electrostatic damage.

Size
6 x 6 x 0.25 (in.)
Material
PEEK(ESD)
Usage
Single reticle transport or storage
Application
Support SMIF standard mechanical interface,Suitable for ASML exposure machine or Support purge function

Feature

ESD static dissipative material: Preventing the reticle from being damaged by static electricity
The shell is made of low outgassing material: reduce the risk of Haze contamination
The contact points with the reticle are all wear-resistant materials: effectively reduce particle generation
Cover the reticle with a special material : effectively block the electric field
Dimensions comply with SEMI specifications
Support RFID function
Run card can be installed on the front and back sides of the upper cover

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