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RSP 150

RSP 150

RSP150-SNN

Provides high-efficiency protection for 6-inch reticles during transportation and storage between process stations. The interior is covered with a special material to block the electric field and protect the reticle from electrostatic damage.
  • Size
    6 x 6 x 0.25 (in.)
  • Material
    PEEK(ESD)
  • Usage
    Support purge function
  • Application
    Support SMIF standard mechanical interface,Suitable for ASML exposure machine or Support purge function
Feature
  • 1.ESD static dissipative material: Preventing the reticle from being damaged by static electricity
    2.The shell is made of low outgassing  material: reduce the risk of Haze contamination
    3.The contact points with the reticle are all wear-resistant materials: effectively reduce particle generation
    4.Dimensions comply with SEMI specifications
    5.Support RFID function
    6.The upper cover is equipped with a metal run card and barcode label holder
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