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RSP 150

RSP 150

Reticle SMIF Pod RSP150 (Handle & Metal Plate)

Provides high-efficiency protection for 6-inch reticles during transportation and storage between process stations.
  • Size
    6 x 6 x 0.25 (in.)
  • Material
    ABS(ESD) or PC(ESD)
  • Usage
    Single reticle transport or storage
  • Application
    Suitable for ASML/Nikon exposure machine
Feature
  • ESD static dissipative material: Preventing the reticle from being damaged by static electricity
  • The contact points with the reticle are all wear-resistant materials: effectively reduce particle generation
  • Dimensions comply with SEMI specifications
  • Support OHT function
  • Support RFID function
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