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RSP 150

RSP 150

Multiple Reticle SMIF Pod (MRSP)

Provides high-efficiency protection for up to 6-inch reticles during transportation and storage between process stations, and has an purge function to control the temperature and humidity of the micro-environment inside the reticle box.
  • Size
    6 x 6 x 0.25 (in.)
  • Material
    ABS(ESD) or PC(ESD)
  • Usage
    Single reticle transport or storage
  • Application
    Suitable for ASML/Nikon exposure machine
Feature
  • Support RFID function, removable RFID holder: easy to read reticle information
  • Low outgassing material and support for purge function: reduce Haze contamination
  • The contact points with the reticle are all wear-resistant materials: effectively reduce particle generation
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