RSP 200

Reticle SMIF Pod RSP200( Handle&Metal Plate)

Provides high-efficiency protection for the transportation and storage of 6-inch reticles between process stations. The integrated upper cover design is easy to clean, and the use of wear-resistant and high-clean materials reduces the risk of particle generation. The large transparent window is easy to view the internal reticle information.

Size
6 x 6 x 0.25 (in.)
Material
Low moisture absorption & Super clean material
Application
Support 200mm SMIF standard mechanical interface

Feature

Support RFID function
Low outgassing material and support for purge function: reduce Haze contamination
ESD static dissipative material: Preventing the reticle from being damaged by static electricity
The contact points with the reticle are all wear-resistant materials: effectively reduce particle generation
Orange transparent window: can effectively block ultraviolet light
Special bottom plate switch mechanism: to prevent the reticle from falling off due to incomplete unlocking
Supports purge function, adopts easy-to-replace Filter design
Selectable items-
a.Number of RFID: 1/2 (one for each side)
b.Number of T-buckles on the upper cover: None/2pcs/4pcs
c.Window: flat/raised

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