RSP 200

RSP200 Reticle transfer box (OHT head)

Provides high-performance protection for transportation and storage of 6-inch reticles between process stations, and supports OHT automatic load/unload. Use wear-resistant and high-clean materials to reduce the risk of particle generation.

Size
6 x 6 x 0.25 (in.)
Material
Low moisture absorption & Super clean material
Application
Support 200mm SMIF standard mechanical interface

Feature

Support RFID function
Low outgassing material and support for purge function: reduce Haze contamination
ESD static dissipative material: Preventing the reticle from being damaged by static electricity
The contact points with the reticle are all wear-resistant materials: effectively reduce particle generation
Special bottom plate switch mechanism: to prevent the reticle from falling off due to incomplete unlocking
Supports purge function, adopts easy-to-replace Filter design
Support OHT function
Selectable items-
Number of RFID: 1/2 (one for each side)

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